Gripping Power，Inc.manufactures high voltage power supplies and accessories for the semiconductor fabrication industry. 

    Since 2002，Gripping Power has produced electrostic chuck power supplies which are programmable，bipolar，floating and tightly regulated.They are compatible with monopolar and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliablity in applications such as：RIE,ICP,PECVD and EUV lithography . They can support 150mm，200mm and 300mm semiconductor wafer production down to the 10nm class and process development at the 5nm node.

    High cable assemblies，RF Traps and OEM specific packaging options are also available.

GPA Series-High Voltage Power Supplies

The GPA Series are low-cost，regulated，high voltage power supplies which are available configured as entry-level electrostatic chuck power supplies，general purpose bipolar power supplies or unipolar bias power supplies.

Features

●Modest-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks

●Operation can be controlled via analog and digital I/O or the USB interface interface

●Compact in size and can be mounted in any orientation

Electrial

All GPA series power supplies are factory configured to operate from 24Vdc.

Mechanical

Dimensions：41.2mm（H）×210.3mm（W）×300mm（D）,1U rack enclosure

Panel Width：241.3mm（half-rack）

GPA Series Electrostatic Power Supplies

GPA Series E variant power supplies feature a  floating，reversible high voltage output on two MHV connectors and are optimized for electrostatic chuck applications.

GPA300E-0 to ±3kV，25W fully floating，electrostatic chuck power supply with reverible polarity.

GPA150E-0 to ±1.5kV，12W fully floating，electrostatic chuck power supply with reverible polarity.

GPA Series Floating High Voltage Power Supplies

GPA Series F variant power supplies feature a floating，reversible high voltage output on two MHV connectors.

GPA300F-0 to ±3kV,25W fully floating，high voltage power supply with reversible polarity.

GPA150F- 0 to ±1.5kV，12W fully floating，high voltage power supply with reversible polarity.

GPA Series Bipolar Power supplies

GPA Series B variant power supplies feature a ground referenced high voltage output via a single MHV connector.

GPA300B 0 to ±3.0kV,25W high voltage power supply with reversible polarity.

GPA150B 0 to ±1.5kV,12W high voltage power supply with reversible polarity.

GPA Series Unipolar Power Supplies

GPA Series U variant power supplies feature a single，ground referenced high voltage output via a single MHV connector.

GPA300U 0 to 3.0kV,25W unipolar，high voltage power supply.

GPA150U 0 to 1.5kV，12W unipolar，high voltage power supply.

GPA series U variant power supplies are factory configured for negative or positive output.Specify P or N suffix when ordering.

GPE Series-Electrostatic Chuck Power Supplies

The GPE series are bipolar，floating，fully-programmable，electrostatic chuck（ESC）power supplies in an embedded enclosure.Valuable instrument rack space can be saved，as these compact units can be located near the RF enclosure.eliminating the need for lengthy high-voltage  cable.

Features

●High-power capability for driving Coulombic or Johnsen-Rahbek electrostatic chucks.

●Output center-point can be fully-floating，ground referenced or biaed

●Voltage output follows user defined chuck and dechuck algorithms

●Up to eight different chuck and dechuck programs can be edited and stored for process flexibility

●Declamp waveform frequencies of up to 10 cycles per second

●Constant voltage and constant current regulation modes

●Operation can be controlled via analog and digital I/O or the USB interface interface

●Wafer sensor adapts to various chuck sizes and RF delivery systems

●Compact in size and can be mounted in any orientation

Electrical

All GPE serie power supplyies are factory configured to operate from 24Vdc.

Mechanical

Dimensions：75mm（H）×210mm（W）×254mm（L）

GPE Series Electrostatic Chuck Power supplies

GPE600 0 to ±6.0kV,50W ESC power supply

GPE300 0 to ±3.0kV，25W ESC power supply 

GPE150 0 to ±1.5kV,12W ESC power supply

GPX Series-Electrostatic Chuck Power Supplies

The GPX series are bipolar，floating，high-power，fully-programmable，electrostatic chuck power supplies for 200mm，300mm and 450mm semiconductor wafer processing.

They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE,ICP,PECVD and lithography.

Features

●High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks

●Efficient switch-mode topology runs cool without forced air

●Output cenrer-point can be fully-floating，ground referenced or biased

●Voltage output follows user defined chuck and dechuck algorithms

●Up to eight different chuck and dechuck programs can be edited and stored for process flexibility

●Declamp waveform frequencies of up to 10 cycles per second

●Constand voltage and constand current regulation modes

●Operation can be controlled by the front panel， analog and digital I/O，USB interface or Ethernet interface

●Wafer sensor adapts to various chuck size and RF delivery system

●Small size conserves instrument rack space

Electrical

GPX series power supplies can be factory configured to oprate from 24Vdc or 100-240Vac 50/60Hz.

Mechanical

Dimensions：82.5mm（H）×210.3mm（W）×300mm（D）,2U rack enclosure

Panel Width：241.3mm（half-rack）

GPX Series Electrostatic Chuck Power Supplies

GPX900  coming soon

GPX600  0 to ±6.0kV,50W bipolar，fully floating，electrostatic chuck power supply

GPX300  0 to ±3.0kV，25W bipolar，fully floating，electrostatic chuck power supply

GPX150  0 to ±1.5kV，12W bipolar，fully floating，electrostatic chuck power supply